Inventor

KAWAMURA KOHEI

JP44 patents

⚠️ This page may combine multiple inventors who share the name “KAWAMURA KOHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAWAMURA KOHEI

TOKYO ELECTRON LTD

Plasma film forming method and apparatus and plasma processing apparatus

Plasma processing apparatus using vertical gas inlets one on top of another

Method of forming dielectric film for semiconductor devices

Etching apparatus and method therefor

Electron beam excited ion source

ECR plasma generator and an ECR system using the generator

Method and apparatus for processing surface of semiconductor layer

Semiconductor device and fabrication method therefor

Plasma processing apparatus

Ion generator

Electron beam excitation ion source

Electron beam excitation ion source

Film forming method and film forming apparatus

Gas switching mechanism for plasma processing apparatus

Substrate for electronic device capable of suppressing fluorine atoms exposed at the surface of insulating film from reacting with water and method for processing same

Placing bed structure, treating apparatus using the structure, and method for using the apparatus

Method for forming insulation film and apparatus for forming insulation film

Plasma processing method for forming a film and an electronic component manufactured by the method

Method for forming insulating film and method for manufacturing semiconductor device

Method for supercritical carbon dioxide processing of fluoro-carbon films

Plasma processing method and plasma processing apparatus

HITACHI HIGH TECH CORP

Ion shield plate for semiconductor manufacturing apparatus

Integrated type ion shield for semiconductor manufacturing apparatus

Plasma processing method and etching apparatus

Plasma etching method and plasma processing apparatus

Plasma etching method and plasma etching apparatus

Etching method and etching apparatus

KANEKA CORP

Fiber for artificial hair and hair ornament product including same

Polyester-based fiber for artificial hair and hair ornament product including the same

Modacrylic shrinkable fiber and method for manufacturing the same

Polyester-based fiber for artificial hair and hair ornament product including the same, and method for producing the same

KAWAMURA KOHEI

Image processing apparatus, control method for the same, and storage medium

Placing bed structure, treating apparatus using the structure, and method for using the apparatus

Fabrication method of a semiconductor device and a semiconductor device

MATSUOKA TAKAAKI

Film forming method for a semiconductor

Film forming method for a semiconductor

TEL YAMANISHI KK

Plasma processing method in semiconductor processing system

RIKAGAKU KENKYUSHO

Ion-producing apparatus

TAKUMA KK

Crushing method for waste containing materials unfit for crushing and apparatus for its practice

CANON KK

Information processing apparatus that stores a plurality of image data items having different data-formats and communicates with an external apparatus via a network, and method therefor

TAKATSUKI KOICHI

Plasma process device and plasma process method

HOKUYO CO LTD

Process for producing regenerated collagen fiber and process for setting the same

UNIV TOHOKU NAT UNIV CORP

Interlayer insulating film, wiring structure and electronic device and methods of manufacturing the same

TOKYO EECTRON LTD

Semiconductor device, method for manufacturing semiconductor device and gas for plasma CVD