Inventor · disambiguated record
Kazuto Takai
Also filed as: TAKAI KAZUTO
4 granted patents·453 citations·filing 2009–2014
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0195US9263298B2Plasma etching apparatus and plasma etching methodMATSUMOTO NAOKI·Filed 2009·Granted Feb 16, 2016·446 cites·7 claims
- 0275US8800484B2Plasma processing apparatusMATSUMOTO NAOKI·Filed 2009·Granted Aug 12, 2014·6 cites·12 claims
- 0360US8771537B2Plasma treatment device and plasma treatment methodOZU TOSHIHISA·Filed 2010·Granted Jul 8, 2014·1 cites·4 claims
- 0452US10224220B2Plasma processing apparatus and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Mar 5, 2019·0 cites·5 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →