Inventor · disambiguated record
David L. Halbmaier
Also filed as: HALBMAIER DAVID · HALBMAIER DAVID L
12 granted patents·2 pending applications·307 citations·filing 1999–2014
93Inventor score
Technology areasH10P
Top patents by PatentIndex Score
14 records- 0195US7328727B2Substrate container with fluid-sealing flow passagewayENTEGRIS INC·Filed 2005·Granted Feb 12, 2008·32 cites·8 claims
- 0294US7607543B2Reticle pod with isolation systemENTEGRIS INC·Filed 2006·Granted Oct 27, 2009·43 cites·20 claims
- 0393US7400383B2Environmental control in a reticle SMIF podENTEGRIS INC·Filed 2006·Granted Jul 15, 2008·43 cites·31 claims
- 0492US7528936B2Substrate container with pressure equalizationENTEGRIS INC·Filed 2006·Granted May 5, 2009·27 cites·12 claims
- 0591US8727125B2Substrate container with fluid-sealing flow passagewayTIEBEN ANTHONY MATHIUS·Filed 2008·Granted May 20, 2014·20 cites·16 claims
- 0688US9745119B2Reticle podENTEGRIS INC·Filed 2013·Granted Aug 29, 2017·8 cites·11 claims
- 0787US8231005B2Reticle podKOLBOW STEVEN P·Filed 2006·Granted Jul 31, 2012·23 cites·8 claims
- 0885US8613359B2Reticle podKOLBOW STEVEN·Filed 2012·Granted Dec 24, 2013·11 cites·9 claims
- 0985US7325698B2Wafer container door with particulate collecting structureENTEGRIS INC·Filed 2005·Granted Feb 5, 2008·11 cites·13 claims
- 1080US6926017B2Wafer container washing apparatusENTEGRIS INC·Filed 2001·Granted Aug 9, 2005·25 cites·15 claims
- 1176US6248177B1Method of cleaning a wafer carrierFLUOROWARE INC·Filed 1999·Granted Jun 19, 2001·49 cites·7 claims
- 1273US7216655B2Wafer container washing apparatusENTEGRIS INC·Filed 2002·Granted May 15, 2007·15 cites·21 claims
- 1355US2015041359A1Substrate container with fluid-sealing flow passagewayENTEGRIS INC·Filed 2014·Application pending·0 cites
- 1447US2011114129A1Methods and apparatuses for controlling contamination of substratesENTEGRIS INC·Filed 2008·Application pending·0 cites
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