P

Inventor

MILLER MATTHEW L

US82 patents
⚠️ This page may combine multiple inventors who share the name “MILLER MATTHEW L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

13 patents
US9144147B2Sep 22, 2015

Semiconductor processing system and methods using capacitively coupled plasma

APPLIED MATERIALS INC188 citations99
US6894245B2May 17, 2005

Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression

APPLIED MATERIALS INC108 citations99
US7967944B2Jun 28, 2011

Method of plasma load impedance tuning by modulation of an unmatched low power RF generator

APPLIED MATERIALS INC57 citations98
US7955986B2Jun 7, 2011

Capacitively coupled plasma reactor with magnetic plasma control

APPLIED MATERIALS INC70 citations98
US7030335B2Apr 18, 2006

Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression

APPLIED MATERIALS INC72 citations98
US6900596B2May 31, 2005

Capacitively coupled plasma reactor with uniform radial distribution of plasma

APPLIED MATERIALS INC224 citations98
US7132618B2Nov 7, 2006

MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression

APPLIED MATERIALS INC43 citations96
US8018164B2Sep 13, 2011

Plasma reactor with high speed plasma load impedance tuning by modulation of different unmatched frequency sources

APPLIED MATERIALS INC47 citations94
US7968469B2Jun 28, 2011

Method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity

APPLIED MATERIALS INC46 citations94
US8357264B2Jan 22, 2013

Plasma reactor with plasma load impedance tuning for engineered transients by synchronized modulation of a source power or bias power RF generator

APPLIED MATERIALS INC33 citations93
US7780866B2Aug 24, 2010

Method of plasma confinement for enhancing magnetic control of plasma radial distribution

APPLIED MATERIALS INC40 citations92
US6652712B2Nov 25, 2003

Inductive antenna for a plasma reactor producing reduced fluorine dissociation

APPLIED MATERIALS INC29 citations91
US6667577B2Dec 23, 2003

Plasma reactor with spoke antenna having a VHF mode with the spokes in phase

APPLIED MATERIALS INC28 citations90

SIGNAFY INC

9 patents

NEC LAB AMERICA INC

6 patents

HALLIBURTON ENERGY SERVICES INC

5 patents

NEC RESEARCH INST INC

4 patents

NEC CORP

3 patents

MILLER MATTHEW L

2 patents

MURPHY ROBERT J

2 patents

(unassigned)

1 patent

NEC RESEARCH INST

1 patent

HALLIBURTON ENERGY SERV INC

1 patent

YANG JANG GYOO

1 patent

LUBOMIRSKY DMITRY

1 patent

LIANG JINGMEI

1 patent

Showing the top 50 of 82 patents by PatentIndex Score.