Inventor
SOEJIMA KAZUYA
JP3 patents
Patents
3 patentsUS10725379B2Jul 28, 2020
Polymide precursor resin composition
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD1 citations56
US11021572B2Jun 1, 2021
Photosensitive resin composition, cured product of same, interlayer insulating film, surface protective film and electronic component
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD0 citations54
US9751984B2Sep 5, 2017
Polyimide precursor, photosensitive resin composition containing said polyimide precursor, and cured-pattern-film manufacturing method and semiconductor device using said photosensitive resin composition
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD1 citations45