Inventor
SUZUKI ETSUHARU
JP2 patents
Patents
2 patentsUS10725379B2Jul 28, 2020
Polymide precursor resin composition
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD1 citations56
US9751984B2Sep 5, 2017
Polyimide precursor, photosensitive resin composition containing said polyimide precursor, and cured-pattern-film manufacturing method and semiconductor device using said photosensitive resin composition
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD1 citations45