Inventor

JANG DONGHYUK

KR3 patents

⚠️ This page may combine multiple inventors who share the name “JANG DONGHYUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

1 patent

US11813714B2Nov 14, 2023

Chemical mechanical polishing pad and chemical mechanical polishing apparatus including the same

SAMSUNG ELECTRONICS CO LTD3 citations65

KANG BYUNG CHUL

1 patent

US9153464B2Oct 6, 2015

Substrate processing apparatus and substrate processing method

KANG BYUNG CHUL4 citations62

CHOI KIHOON

1 patent

US9349626B2May 24, 2016

Buffer units, substrate processing apparatuses, and substrate processing methods

CHOI KIHOON0 citations29