Inventor · disambiguated record

Lewis Bernett

Also filed as: BERNETT LEWIS C

0 granted patents·1 pending application·0 citations·filing 2006–2006

Technology areasH10P

Files withASM INC1

Top patents by PatentIndex Score

1 record

0148US2007056150A1Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holderASM INC·Filed 2006·Application pending·0 cites

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