Inventor
DAVIS NATHAN ARRON
US9 patents
Patents
9 patentsUS11648645B2May 16, 2023
Pad conditioner cleaning system
APPLIED MATERIALS INC1 citations70
US11370083B2Jun 28, 2022
Pad conditioner cleaning system
APPLIED MATERIALS INC2 citations70
US12459080B2Nov 4, 2025
Cleaning system for polishing liquid delivery arm
APPLIED MATERIALS INC0 citations60
US12240078B2Mar 4, 2025
Cleaning system for polishing liquid delivery arm
APPLIED MATERIALS INC0 citations60
US12134167B2Nov 5, 2024
Pad conditioner cleaning system
APPLIED MATERIALS INC0 citations60
US11986925B2May 21, 2024
Maintenance methods for polishing systems and articles related thereto
APPLIED MATERIALS INC0 citations60
US11756804B2Sep 12, 2023
Platen shield cleaning system
APPLIED MATERIALS INC0 citations60
US11545371B2Jan 3, 2023
Platen shield cleaning system
APPLIED MATERIALS INC1 citations60
US11484987B2Nov 1, 2022
Maintenance methods for polishing systems and articles related thereto
APPLIED MATERIALS INC0 citations60