Inventor · disambiguated record
Richard Endo
Also filed as: ENDO RICHARD · ENDO RICHARD R
8 granted patents·8 pending applications·33 citations·filing 2006–2014
84Inventor score
Top patents by PatentIndex Score
16 records- 0187US9175391B2Apparatus and method for combinatorial gas distribution through a multi-zoned showerheadENDO RICHARD·Filed 2011·Granted Nov 3, 2015·11 cites·13 claims
- 0286US8906160B2Vapor based processing system with purge modeENDO RICHARD·Filed 2010·Granted Dec 9, 2014·5 cites·14 claims
- 0386US7867904B2Method and system for isolated and discretized process sequence integrationINTERMOLECULAR INC·Filed 2007·Granted Jan 11, 2011·8 cites·20 claims
- 0478US7785172B2Combinatorial processing including rotation and movement within a regionINTERMOLECULAR INC·Filed 2007·Granted Aug 31, 2010·6 cites·13 claims
- 0576US8973524B2Combinatorial spin depositionINTERMOLECULAR INC·Filed 2012·Granted Mar 10, 2015·1 cites·9 claims
- 0671US8815013B2Method and system for isolated and discretized process sequence integrationCHIANG TONY P·Filed 2007·Granted Aug 26, 2014·2 cites·24 claims
- 0758US2014318450A1Method and System for Isolated and Discretized Process Sequence IntegrationINTERMOLECULAR INC·Filed 2014·Application pending·0 cites
- 0852US8283264B2Method and system for isolated and discretized process sequence integrationCHIANG TONY P·Filed 2010·Granted Oct 9, 2012·0 cites·7 claims
- 0949US8486844B2Method and system for isolated and discretized process sequence integrationENDO RICHARD R·Filed 2012·Granted Jul 16, 2013·0 cites·5 claims
- 1049US2007234951A1Methods and apparatus for cleaning a substrateLU WEI·Filed 2007·Application pending·0 cites
- 1144US2008230092A1Method and apparatus for single-substrate cleaningKO ALEXANDER SOU-KANG·Filed 2007·Application pending·0 cites
- 1241US2007254098A1Apparatus for single-substrate processing with multiple chemicals and method of useAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1340US2008163891A1Method and apparatus of multi steps atomization for generating smaller diw dropplets for wafer cleaningAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 1439US2014166840A1Substrate CarrierINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 1536US2012315396A1Apparatus and method for combinatorial plasma distribution through a multi-zoned showerheadENDO RICHARD·Filed 2011·Application pending·0 cites
- 1633US2012160264A1Wet Processing Tool with Site IsolationENDO RICHARD·Filed 2010·Application pending·0 cites
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