Inventor
DIVERGILIO WILLIAM F
US27 patents
⚠️ This page may combine multiple inventors who share the name “DIVERGILIO WILLIAM F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
21 patentsUS6305316B1Oct 23, 2001
Integrated power oscillator RF source of plasma immersion ion implantation system
AXCELIS TECH INC67 citations94
US6635890B2Oct 21, 2003
Slit double gap buncher and method for improved ion bunching in an ion implantation system
AXCELIS TECH INC31 citations92
US6414329B1Jul 2, 2002
Method and system for microwave excitation of plasma in an ion beam guide
AXCELIS TECH INC32 citations92
US6759665B2Jul 6, 2004
Method and system for ion beam containment in an ion beam guide
AXCELIS TECH INC34 citations90
US6541781B1Apr 1, 2003
Waveguide for microwave excitation of plasma in an ion beam guide
AXCELIS TECH INC22 citations90
US6208095B1Mar 27, 2001
Compact helical resonator coil for ion implanter linear accelerator
AXCELIS TECH INC37 citations90
US6949895B2Sep 27, 2005
Unipolar electrostatic quadrupole lens and switching methods for charged beam transport
AXCELIS TECH INC24 citations89
US6664548B2Dec 16, 2003
Ion source and coaxial inductive coupler for ion implantation system
AXCELIS TECH INC15 citations84
US7845310B2Dec 7, 2010
Wide area radio frequency plasma apparatus for processing multiple substrates
AXCELIS TECH INC11 citations83
US7589333B2Sep 15, 2009
Methods for rapidly switching off an ion beam
AXCELIS TECH INC12 citations83
US6653643B2Nov 25, 2003
Method and apparatus for improved ion acceleration in an ion implantation system
AXCELIS TECH INC17 citations83
US7531819B2May 12, 2009
Fluorine based cleaning of an ion source
AXCELIS TECH INC18 citations77
US7800083B2Sep 21, 2010
Plasma electron flood for ion beam implanter
AXCELIS TECH INC7 citations74
US6947274B2Sep 20, 2005
Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage
AXCELIS TECH INC11 citations74
US6879109B2Apr 12, 2005
Thin magnetron structures for plasma generation in ion implantation systems
AXCELIS TECH INC10 citations74
US6583429B2Jun 24, 2003
Method and apparatus for improved ion bunching in an ion implantation system
AXCELIS TECH INC12 citations73
US6653803B1Nov 25, 2003
Integrated resonator and amplifier system
AXCELIS TECH INC10 citations72
US7947966B2May 24, 2011
Double plasma ion source
AXCELIS TECH INC2 citations63
US7748344B2Jul 6, 2010
Segmented resonant antenna for radio frequency inductively coupled plasmas
AXCELIS TECH INC4 citations63
US7078707B1Jul 18, 2006
Ion beam scanning control methods and systems for ion implantation uniformity
AXCELIS TECH INC5 citations63
US7750314B2Jul 6, 2010
Elevated temperature RF ion source
AXCELIS TECH INC0 citations52