Inventor

RYAN KEVIN T

US4 patents

⚠️ This page may combine multiple inventors who share the name “RYAN KEVIN T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

2 patents

US6305316B1Oct 23, 2001

Integrated power oscillator RF source of plasma immersion ion implantation system

AXCELIS TECH INC67 citations94

US6794664B1Sep 21, 2004

Umbilical cord facilities connection for an ion beam implanter

AXCELIS TECH INC23 citations90

APPLIED MATERIALS INC

2 patents

US11948781B2Apr 2, 2024

Apparatus and system including high angle extraction optics

APPLIED MATERIALS INC0 citations59

US12106943B2Oct 1, 2024

Substrate halo arrangement for improved process uniformity

APPLIED MATERIALS INC0 citations50