Inventor

TOIYA MASATAKA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “TOIYA MASATAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

USD594488SJun 16, 2009

Process tube for manufacturing semiconductor wafers

TOKYO ELECTRON LTD18 citations89

SATO JUN

1 patent

US8338312B2Dec 25, 2012

Film formation method, film formation apparatus, and method for using film formation apparatus

SATO JUN12 citations81

INOUE HISASHI

1 patent

US8153534B2Apr 10, 2012

Direct oxidation method for semiconductor process

INOUE HISASHI1 citations47