USD594488SActiveUtility

Process tube for manufacturing semiconductor wafers

Assignee: TOKYO ELECTRON LTDPriority: Apr 20, 2007Filed: Oct 12, 2007Granted: Jun 16, 2009

Est. expiryApr 20, 2027(~0.8 yrs left)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.

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