Inventor
GRAF ECKHARD
DE21 patents
⚠️ This page may combine multiple inventors who share the name “GRAF ECKHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
11 patentsUS6406979B2Jun 18, 2002
Method for sectioning a substrate wafer into a plurality of substrate chips
BOSCH GMBH ROBERT72 citations96
US5937275AAug 10, 1999
Method of producing acceleration sensors
BOSCH GMBH ROBERT67 citations95
US6951824B2Oct 4, 2005
Method for manufacturing a micromechanical component and a component that is manufactured in accordance with the method
BOSCH GMBH ROBERT46 citations92
US6876048B2Apr 5, 2005
Micromechanical component as well as a method for producing a micromechanical component
BOSCH GMBH ROBERT22 citations92
US6465854B1Oct 15, 2002
Micromechanical component
BOSCH GMBH ROBERT36 citations92
US6140709AOct 31, 2000
Bonding pad structure and method for manufacturing the bonding pad structure
BOSCH GMBH ROBERT26 citations92
US7153718B2Dec 26, 2006
Micromechanical component as well as a method for producing a micromechanical component
BOSCH GMBH ROBERT14 citations84
US6955975B2Oct 18, 2005
Method for joining a silicon plate to a second plate
BOSCH GMBH ROBERT7 citations73
US11261082B2Mar 1, 2022
Micromechanical device and method for manufacturing a micromechanical device
BOSCH GMBH ROBERT0 citations56
US7294894B2Nov 13, 2007
Micromechanical cap structure and a corresponding production method
BOSCH GMBH ROBERT1 citations52
US10752498B2Aug 25, 2020
MEMS component having two different internal pressures
BOSCH GMBH ROBERT0 citations40
SCHEUERER ROLAND
3 patentsUS8564078B2Oct 22, 2013
Method for producing a micromechanical component having a trench structure for backside contact
SCHEUERER ROLAND0 citations48
US8419957B2Apr 16, 2013
Method for producing a micromechanical component having a filler layer and a masking layer
SCHEUERER ROLAND0 citations48
US8138006B2Mar 20, 2012
Method for producing a micromechanical component having a trench structure for backside contact
SCHEUERER ROLAND0 citations48