P

Inventor

FUJIMURA AKIRA

US171 patents
⚠️ This page may combine multiple inventors who share the name “FUJIMURA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

D2S INC

25 patents
US7901850B2Mar 8, 2011

Method and system for design of a reticle to be manufactured using variable shaped beam lithography

D2S INC76 citations99
US7754401B2Jul 13, 2010

Method for manufacturing a surface and integrated circuit using variable shaped beam lithography

D2S INC76 citations98
US8039176B2Oct 18, 2011

Method for fracturing and forming a pattern using curvilinear characters with charged particle beam lithography

D2S INC33 citations96
US7759027B2Jul 20, 2010

Method and system for design of a reticle to be manufactured using character projection lithography

D2S INC48 citations94
US8900778B2Dec 2, 2014

Method for forming circular patterns on a surface

D2S INC18 citations93
US8828628B2Sep 9, 2014

Method and system for design of a reticle to be manufactured using variable shaped beam lithography

D2S INC21 citations93
US8354207B2Jan 15, 2013

Method, device, and system for forming circular patterns on a surface

D2S INC21 citations93
US7799489B2Sep 21, 2010

Method for design and manufacture of a reticle using variable shaped beam lithography

D2S INC33 citations93
US9043734B2May 26, 2015

Method and system for forming high accuracy patterns using charged particle beam lithography

D2S INC13 citations92
US8017289B2Sep 13, 2011

Method for manufacturing a surface and integrated circuit using variable shaped beam lithography

D2S INC16 citations92
US7759026B2Jul 20, 2010

Method and system for manufacturing a reticle using character projection particle beam lithography

D2S INC25 citations92
US7745078B2Jun 29, 2010

Method and system for manufacturing a reticle using character projection lithography

D2S INC17 citations92
US7579606B2Aug 25, 2009

Method and system for logic design for cell projection particle beam lithography

D2S INC19 citations92
US8719739B2May 6, 2014

Method and system for forming patterns using charged particle beam lithography

D2S INC22 citations90
US9715169B2Jul 25, 2017

Method and system for forming a pattern on a reticle using charged particle beam lithography

D2S INC7 citations84
US9625809B2Apr 18, 2017

Method and system for forming patterns using charged particle beam lithography with variable pattern dosage

D2S INC5 citations84
US9372391B2Jun 21, 2016

Method and system for forming patterns using charged particle beam lithography with variable pattern dosage

D2S INC10 citations84
US9341936B2May 17, 2016

Method and system for forming a pattern on a reticle using charged particle beam lithography

D2S INC9 citations84
US9343267B2May 17, 2016

Method and system for dimensional uniformity using charged particle beam lithography

D2S INC12 citations84
US9323140B2Apr 26, 2016

Method and system for forming a pattern on a reticle using charged particle beam lithography

D2S INC8 citations84
US9274412B2Mar 1, 2016

Method and system for design of a reticle to be manufactured using variable shaped beam lithography

D2S INC3 citations84
US8916315B2Dec 23, 2014

Method for fracturing and forming a pattern using shaped beam charged particle beam lithography

D2S INC5 citations84
US8017288B2Sep 13, 2011

Method for fracturing circular patterns and for manufacturing a semiconductor device

D2S INC11 citations84
US8017286B2Sep 13, 2011

Method for design and manufacture of a reticle using a two-dimensional dosage map and charged particle beam lithography

D2S INC12 citations84
US7985514B2Jul 26, 2011

Method for fracturing a pattern for writing with a shaped charged particle beam writing system using dragged shots

D2S INC12 citations84

CADENCE DESIGN SYSTEMS INC

10 patents

FUJIMURA AKIRA

7 patents

HONDA MOTOR CO LTD

3 patents

ZABLE HAROLD ROBERT

3 patents

NIPPON ELECTRIC CO

1 patent

DS2 INC

1 patent

Showing the top 50 of 171 patents by PatentIndex Score.