Inventor
WU CHEN-HAU
TW12 patents
⚠️ This page may combine multiple inventors who share the name “WU CHEN-HAU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
10 patentsUS9581908B2Feb 28, 2017
Photoresist and method
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10365561B2Jul 30, 2019
Photoresist and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11073763B2Jul 27, 2021
Photoresist and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10514603B2Dec 24, 2019
Photoresist and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10276377B2Apr 30, 2019
Method for patterning interconnects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10114286B2Oct 30, 2018
Photoresist and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US10036953B2Jul 31, 2018
Photoresist system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9989850B2Jun 5, 2018
Photoresist system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9773671B1Sep 26, 2017
Material composition and process for mitigating assist feature pattern transfer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9529265B2Dec 27, 2016
Method of preparing and using photosensitive material
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41