Inventor · disambiguated record
Son T. Chau
Also filed as: CHAU SON T
2 granted patents·4 pending applications·4 citations·filing 2014–2023
43Inventor score
Files withEXOGENESIS CORP6
Top patents by PatentIndex Score
6 records- 0177US10670960B2Enhanced high aspect ratio etch performance using accelerated neutral beams derived from gas-cluster ion beamsEXOGENESIS CORP·Filed 2018·Granted Jun 2, 2020·4 cites·13 claims
- 0264US2024018003A1Using anab technology to remove production processing residuals from grapheneEXOGENESIS CORP·Filed 2023·Application pending·0 cites
- 0358US10539867B2Film and methods of forming sameEXOGENESIS CORP·Filed 2014·Granted Jan 21, 2020·0 cites·14 claims
- 0457US2020387065A1Film and methods of forming sameEXOGENESIS CORP·Filed 2019·Application pending·0 cites
- 0555US2020022247A1Method and apparatus for directing a neutral beamEXOGENESIS CORP·Filed 2019·Application pending·0 cites
- 0650US2015366044A1Method and apparatus for directing a neutral beamEXOGENESIS CORP·Filed 2014·Application pending·0 cites
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