Inventor · disambiguated record
Sankaram Athreya
Also filed as: ATHREYA SANKARAM
3 granted patents·551 citations·filing 2000–2001
81Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC3
Top patents by PatentIndex Score
3 records- 0198US6277249B1Integrated process for copper via filling using a magnetron and target producing highly energetic ionsAPPLIED MATERIALS INC·Filed 2000·Granted Aug 21, 2001·273 cites·27 claims
- 0298US6274008B1Integrated process for copper via fillingAPPLIED MATERIALS INC·Filed 2000·Granted Aug 14, 2001·231 cites·19 claims
- 0392US6485618B2Integrated copper fill processAPPLIED MATERIALS INC·Filed 2001·Granted Nov 26, 2002·47 cites·26 claims
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