Inventor

NAGATOMI YOSHIMASA

JP9 patents

⚠️ This page may combine multiple inventors who share the name “NAGATOMI YOSHIMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

7 patents

USD1020668SApr 2, 2024

Gas injector for substrate processing apparatus

KOKUSAI ELECTRIC CORP5 citations73

US11970771B2Apr 30, 2024

Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations62

US10910217B2Feb 2, 2021

Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus

KOKUSAI ELECTRIC CORP1 citations61

US12503767B2Dec 23, 2025

Non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method

KOKUSAI ELECTRIC CORP0 citations60

US12000045B2Jun 4, 2024

Method of manufacturing semiconductor device, non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method

KOKUSAI ELECTRIC CORP0 citations60

US12249502B2Mar 11, 2025

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations49

US12503768B2Dec 23, 2025

Substrate processing apparatus, method of manufacturing semiconductor device, method of processing substrate, and gas injector

KOKUSAI ELECTRIC CORP0 citations48

HITACHI INT ELECTRIC INC

2 patents

US11293096B2Apr 5, 2022

Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer

HITACHI INT ELECTRIC INC8 citations85

US10707074B2Jul 7, 2020

Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus

HITACHI INT ELECTRIC INC5 citations82