Inventor · disambiguated record
Alvaro Garcia De Gorordo
Also filed as: GARCIA DE GORORDO ALVARO · GARCÍA DE GORORDO ÁLVARO
12 granted patents·4 pending applications·23 citations·filing 2013–2023
86Inventor score
Files withAPPLIED MATERIALS INC16
Top patents by PatentIndex Score
16 records- 0198US11087989B1Cryogenic atomic layer etch with noble gasesAPPLIED MATERIALS INC·Filed 2020·Granted Aug 10, 2021·8 cites·20 claims
- 0295US11764041B2Adjustable thermal break in a substrate supportAPPLIED MATERIALS INC·Filed 2020·Granted Sep 19, 2023·4 cites·18 claims
- 0395US11646183B2Substrate support assembly with arc resistant coolant conduitAPPLIED MATERIALS INC·Filed 2020·Granted May 9, 2023·4 cites·19 claims
- 0494US11515166B2Cryogenic atomic layer etch with noble gasesAPPLIED MATERIALS INC·Filed 2021·Granted Nov 29, 2022·2 cites·20 claims
- 0580US12444585B2Electrical connector for cooled substrate support assemblyAPPLIED MATERIALS INC·Filed 2020·Granted Oct 14, 2025·1 cites·20 claims
- 0680US11666952B2Condition selectable backside gasAPPLIED MATERIALS INC·Filed 2020·Granted Jun 6, 2023·1 cites·6 claims
- 0779US11996294B2Cryogenic atomic layer etch with noble gasesAPPLIED MATERIALS INC·Filed 2022·Granted May 28, 2024·0 cites·20 claims
- 0871US10656029B2Processing system having optical temperature measurement subsystemAPPLIED MATERIALS INC·Filed 2017·Granted May 19, 2020·1 cites·15 claims
- 0971US9257265B2Methods for reducing etch nonuniformity in the presence of a weak magnetic field in an inductively coupled plasma reactorAPPLIED MATERIALS INC·Filed 2014·Granted Feb 9, 2016·2 cites·16 claims
- 1070US12397330B2Condition selectable backside gasAPPLIED MATERIALS INC·Filed 2023·Granted Aug 26, 2025·0 cites·19 claims
- 1156US2024408712A1Ceramic cooling baseAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1250US2025112029A1Suppressing heating of a plasma processing chamber lidAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1347US11437261B2Cryogenic electrostatic chuckAPPLIED MATERIALS INC·Filed 2018·Granted Sep 6, 2022·0 cites·20 claims
- 1446US12334315B2Cooled substrate support assembly for radio frequency environmentsAPPLIED MATERIALS INC·Filed 2020·Granted Jun 17, 2025·0 cites·17 claims
- 1545US2014262044A1Mu metal shield coverAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 1643US2014209244A1Skew elimination and control in a plasma enhanced substrate processing chamberAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →