Inventor

VETTIGER PETER

CH62 patents

⚠️ This page may combine multiple inventors who share the name “VETTIGER PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VETTIGER PETER

IBM

Semiconductor device with a high thermal dissipation efficiency

Mechanical signal producer based on micromechanical oscillators and intelligent acoustic detectors and systems based thereon

Method of passivating etched mirror facets of semiconductor laser diodes

Mechanically coupled alternatively usable cantilever structures for scanning a surface

Mass-storage applications of local probe arrays

Three-dimensional integrated CMOS-MEMS device and process for making the same

Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever

Investigation and/or manipulation device

Method for making cooling structures for directly cooling an active layer of a semiconductor chip

Bilithic composite for optoelectronic integration

Cooling structures and package modules for semiconductors

Method for improving the planarity of etched mirror facets

Semiconductor device with a high thermal dissipation efficiency

Three-dimensional integrated CMOS-MEMS device and process for making the same

AFM-based data storage and microscopy

Method of forming ultrasmall structures and apparatus therefor

Shape memory alloy recording medium, storage devices based thereon, and method for using these storage devices

Optical fiber alignment

Method for batch cleaving semiconductor wafers and coating cleaved facets

Process for producing undercut dummy gate mask profiles for MESFETs

High density data storage medium

Magnetic millipede for ultra high density magnetic storage

Optical devices

Dehumidifier and control system for a disk drive

Magnetic scanning or positioning system with at least two degrees of freedom

High density data storage medium

Cantilever with integrated deflection sensor

Method of transferring a pattern into a radiation-sensitive layer

Process for forming sub-micrometer patterns using silylation of resist side walls

Investigation device and method

Patterning method

Semiconductor device with a high thermal dissipation efficiency

Thermal movement sensor

Apparatus and method for storing and reading high data capacities

Microstructures

Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever

Scanner for precise movement and low power consumption

Integrated light deflector and method of fabrication therefor

Integrated light deflector and method of fabrication therefor

Method of inspecting a mask using an electron beam vector scan system

Microsystem switches

Mask and method for modification of a surface

Method and apparatus for monitoring the on/off-hook status of a telephone set

Electronic hybrid circuit for connecting a two-wire line to switching system

Method and apparatus for the transmission of speech signals

System for improving the uniformness of patterns generated by electron beam lithography

SEIKO INSTR INC

Microprobe and scanning probe apparatus having microprobe

BUCHMANN PETER L

Improved planar etched mirror facets

OHLSSON OLAF

Low-cost photoplastic cantilever

HITACHI GLOBAL STORAGE TECH

Head suspension for disk-based data storage apparatus