Inventor
KATO SHIGEKAZU
JP66 patents
⚠️ This page may combine multiple inventors who share the name “KATO SHIGEKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
45 patentsUS5685684ANov 11, 1997
Vacuum processing system
HITACHI LTD112 citations98
US5320982AJun 14, 1994
Wafer cooling method and apparatus
HITACHI LTD142 citations98
US5784799AJul 28, 1998
Vacuum processing apparatus for substate wafers
HITACHI LTD59 citations97
US5314509AMay 24, 1994
Vacuum processing apparatus and operating method therefor
HITACHI LTD78 citations97
US5553396ASep 10, 1996
Vacuum processing apparatus and operating method therefor
HITACHI LTD24 citations96
US5445484AAug 29, 1995
Vacuum processing system
HITACHI LTD67 citations96
US5349762ASep 27, 1994
Vacuum processing apparatus and operating method therefor
HITACHI LTD28 citations96
US5673750AOct 7, 1997
Vacuum processing method and apparatus
HITACHI LTD37 citations93
US5663884ASep 2, 1997
Multiprocessing apparatus
HITACHI LTD19 citations93
US6301802B1Oct 16, 2001
Vacuum processing apparatus and operating method therefor
HITACHI LTD13 citations86
US5950330ASep 14, 1999
Vacuum processing apparatus and operating method therefor
HITACHI LTD16 citations86
US5661913ASep 2, 1997
Vacuum processing apparatus and operating method therefor
HITACHI LTD11 citations86
US6968630B2Nov 29, 2005
Vacuum processing apparatus and operating method therefor
HITACHI LTD7 citations82
US6886272B2May 3, 2005
Vacuum processing apparatus and operating method therefor
HITACHI LTD4 citations82
US6880264B2Apr 19, 2005
Vacuum processing apparatus and operating method therefor
HITACHI LTD4 citations82
US6634116B2Oct 21, 2003
Vacuum processing apparatus
HITACHI LTD6 citations82
US6446353B2Sep 10, 2002
Vacuum processing apparatus
HITACHI LTD6 citations82
US6314658B2Nov 13, 2001
Vacuum processing apparatus and operating method therefor
HITACHI LTD5 citations82
US6108929AAug 29, 2000
Vacuum processing apparatus
HITACHI LTD5 citations82
US5457896AOct 17, 1995
Vacuum processing apparatus and operating method therefor
HITACHI LTD9 citations82
US5448470ASep 5, 1995
Multiprocessing apparatus
HITACHI LTD16 citations82
US7367135B2May 6, 2008
Vacuum processing apparatus and operating method therefor
HITACHI LTD2 citations74
US6904699B2Jun 14, 2005
Vacuum processing apparatus and operating method therefor
HITACHI LTD2 citations74
US6662465B2Dec 16, 2003
Vacuum processing apparatus
HITACHI LTD2 citations74
US6655044B2Dec 2, 2003
Vacuum processing apparatus and operating method therefor
HITACHI LTD2 citations74
US6625899B2Sep 30, 2003
Vacuum processing apparatus
HITACHI LTD2 citations74
US6588121B2Jul 8, 2003
Vacuum processing apparatus
HITACHI LTD2 citations74
USD473354SApr 15, 2003
Vacuum processing equipment configuration
HITACHI LTD10 citations74
US6505415B2Jan 14, 2003
Vacuum processing apparatus
HITACHI LTD2 citations74
US6499229B2Dec 31, 2002
Vacuum processing apparatus
HITACHI LTD2 citations74
US6490810B2Dec 10, 2002
Vacuum processing apparatus
HITACHI LTD1 citations74
US6487791B2Dec 3, 2002
Vacuum processing apparatus
HITACHI LTD2 citations74
US6484414B2Nov 26, 2002
Vacuum processing apparatus
HITACHI LTD3 citations74
US6473989B2Nov 5, 2002
Conveying system for a vacuum processing apparatus
HITACHI LTD3 citations74
US6470596B2Oct 29, 2002
Vacuum processing apparatus and operating method therefor
HITACHI LTD1 citations74
US6467187B2Oct 22, 2002
Vacuum processing apparatus and operating method therefor
HITACHI LTD2 citations74
US6467186B2Oct 22, 2002
Transferring device for a vacuum processing apparatus and operating method therefor
HITACHI LTD2 citations74
US6460270B2Oct 8, 2002
Vacuum processing apparatus
HITACHI LTD2 citations74
USD453402SFeb 5, 2002
Vacuum processing equipment configuration
HITACHI LTD12 citations74
US6332280B2Dec 25, 2001
Vacuum processing apparatus
HITACHI LTD1 citations74
US6330755B1Dec 18, 2001
Vacuum processing and operating method
HITACHI LTD2 citations74
US6112431ASep 5, 2000
Vacuum processing and operating method
HITACHI LTD1 citations74
US6070341AJun 6, 2000
Vacuum processing and operating method with wafers, substrates and/or semiconductors
HITACHI LTD1 citations74
US6044576AApr 4, 2000
Vacuum processing and operating method using a vacuum chamber
HITACHI LTD1 citations74
US6012235AJan 11, 2000
Vacuum processing apparatus and operating method therefor
HITACHI LTD2 citations74
NISHIHATA KOUJI
1 patentSTANLEY ELECTRIC CO LTD
1 patentAGENCY IND SCIENCE TECHN
1 patentAIWA CO
1 patent(unassigned)
1 patentShowing the top 50 of 66 patents by PatentIndex Score.