USD473354SExpiredUtility

Vacuum processing equipment configuration

59
Assignee: HITACHI LTDPriority: Aug 29, 1990Filed: Jan 12, 1999Granted: Apr 15, 2003
Est. expiryAug 29, 2010(expired)· nominal 20-yr term from priority
Inventors:Shigekazu KatoKouji NishihataTsunehiko TsuboneAtsushi Itou
59
PatentIndex Score
10
Cited by
48
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a vacuum processing equipment configuration, as shown and described.

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