Inventor · disambiguated record
Kouji Nishihata
Also filed as: NISHIHATA KOUJI
73 granted patents·3 pending applications·990 citations·filing 1983–2005
99Inventor score
Top patents by PatentIndex Score
76 records- 0193US5784799AVacuum processing apparatus for substate wafersHITACHI LTD·Filed 1997·Granted Jul 28, 1998·59 cites·8 claims
- 0293US5314509AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1991·Granted May 24, 1994·78 cites·23 claims
- 0391US5320982AWafer cooling method and apparatusHITACHI LTD·Filed 1991·Granted Jun 14, 1994·142 cites·13 claims
- 0490US5685684AVacuum processing systemHITACHI LTD·Filed 1996·Granted Nov 11, 1997·112 cites·4 claims
- 0586US6301802B1Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Oct 16, 2001·13 cites·11 claims
- 0682US7367135B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2005·Granted May 6, 2008·2 cites·2 claims
- 0782US5553396AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1995·Granted Sep 10, 1996·24 cites·10 claims
- 0882US5349762AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1993·Granted Sep 27, 1994·28 cites·28 claims
- 0981US6795745B1Methods of operating vacuum processing equipment and methods of processing wafersHITACHI LTD·Filed 2000·Granted Sep 21, 2004·26 cites·6 claims
- 1081US5078851ALow-temperature plasma processorNISHIHATA KOUJI·Filed 1990·Granted Jan 7, 1992·81 cites·8 claims
- 1180US6968630B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2004·Granted Nov 29, 2005·7 cites·2 claims
- 1279US5445484AVacuum processing systemHITACHI LTD·Filed 1993·Granted Aug 29, 1995·67 cites·5 claims
- 1377US6745093B1Vacuum process apparatus and method of operating the sameHITACHI LTD·Filed 2000·Granted Jun 1, 2004·19 cites·10 claims
- 1477US6634116B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Oct 21, 2003·6 cites·5 claims
- 1577US6446353B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Sep 10, 2002·6 cites·37 claims
- 1676US6920369B2Methods of operating vacuum processing equipment and methods of processing wafersHITACHI LTD·Filed 2004·Granted Jul 19, 2005·17 cites·3 claims
- 1776US5950330AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1998·Granted Sep 14, 1999·16 cites·28 claims
- 1875US6314658B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2000·Granted Nov 13, 2001·5 cites·25 claims
- 1973US6886272B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2003·Granted May 3, 2005·4 cites·9 claims
- 2073US6880264B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2003·Granted Apr 19, 2005·4 cites·108 claims
- 2173US6714832B1Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2000·Granted Mar 30, 2004·12 cites·9 claims
- 2272US6917844B2Vacuum process apparatus and method of operating the sameHITACHI LTD·Filed 2004·Granted Jul 12, 2005·13 cites·5 claims
- 2371US6941185B2Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2002·Granted Sep 6, 2005·11 cites·18 claims
- 2471US6853872B2Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2002·Granted Feb 8, 2005·10 cites·10 claims
- 2571US6069096AOperating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 1997·Granted May 30, 2000·40 cites·15 claims
- 2670US5673750AVacuum processing method and apparatusHITACHI LTD·Filed 1995·Granted Oct 7, 1997·37 cites·9 claims
- 2770US5661913AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1996·Granted Sep 2, 1997·11 cites·9 claims
- 2869US6484414B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Nov 26, 2002·3 cites·20 claims
- 2969US6473989B2Conveying system for a vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Nov 5, 2002·3 cites·9 claims
- 3065US6904699B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2004·Granted Jun 14, 2005·2 cites·4 claims
- 3165US6588121B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Jul 8, 2003·2 cites·11 claims
- 3265US6467187B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Oct 22, 2002·2 cites·9 claims
- 3365US6467186B2Transferring device for a vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Oct 22, 2002·2 cites·5 claims
- 3465US6460270B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Oct 8, 2002·2 cites·3 claims
- 3564US6662465B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Dec 16, 2003·2 cites·46 claims
- 3664US6655044B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Dec 2, 2003·2 cites·23 claims
- 3764US6625899B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Sep 30, 2003·2 cites·22 claims
- 3864US6505415B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Jan 14, 2003·2 cites·44 claims
- 3964US6499229B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Dec 31, 2002·2 cites·14 claims
- 4064US6487791B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Dec 3, 2002·2 cites·33 claims
- 4164USD453402SVacuum processing equipment configurationHITACHI LTD·Filed 1999·Granted Feb 5, 2002·12 cites·1 claims
- 4262US5457896AVacuum processing apparatus and operating method thereforHITACHI LTD·Filed 1994·Granted Oct 17, 1995·9 cites·12 claims
- 4359USD473354SVacuum processing equipment configurationHITACHI LTD·Filed 1999·Granted Apr 15, 2003·10 cites·1 claims
- 4459US6490810B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Dec 10, 2002·1 cites·14 claims
- 4559US6470596B2Vacuum processing apparatus and operating method thereforHITACHI LTD·Filed 2001·Granted Oct 29, 2002·1 cites·19 claims
- 4659US6332280B2Vacuum processing apparatusHITACHI LTD·Filed 2001·Granted Dec 25, 2001·1 cites·13 claims
- 4759US6301801B1Vacuum processing apparatus and operating method thereforFiled 2000·Granted Oct 16, 2001·1 cites·15 claims
- 4856US6596551B1Etching end point judging method, etching end point judging device, and insulating film etching method using these methodsHITACHI LTD·Filed 1999·Granted Jul 22, 2003·17 cites·15 claims
- 4956US6108929AVacuum processing apparatusHITACHI LTD·Filed 1999·Granted Aug 29, 2000·5 cites·15 claims
- 5054US5663884AMultiprocessing apparatusHITACHI LTD·Filed 1995·Granted Sep 2, 1997·19 cites·6 claims
Showing the top 50 of 76 patent records by PatentIndex Score.
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