Inventor · disambiguated record

Christian Sparka

Also filed as: SPARKA CHRISTIAN

2 granted patents·2 citations·filing 2013–2017

34Inventor score

Technology areasG03F H10P

Files withKLA TENCOR CORP2

Top patents by PatentIndex Score

2 records

0167US10340165B2Systems and methods for automated multi-zone detection and modelingKLA TENCOR CORP·Filed 2017·Granted Jul 2, 2019·2 cites·34 claims
0240US9291920B2Focus recipe determination for a lithographic scannerKLA TENCOR CORP·Filed 2013·Granted Mar 22, 2016·0 cites·20 claims

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Christian Sparka — Patent Inventor | PatentIndex