Inventor
SATO YUUSUKE
JP50 patents
⚠️ This page may combine multiple inventors who share the name “SATO YUUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
23 patentsUS5897710AApr 27, 1999
Substrate processing apparatus and substrate processing method
TOSHIBA KK384 citations98
US5766360AJun 16, 1998
Substrate processing apparatus and substrate processing method
TOSHIBA KK123 citations98
US5474612ADec 12, 1995
Vapor-phase deposition apparatus and vapor-phase deposition method
TOSHIBA KK445 citations98
US5527393AJun 18, 1996
Vapor-phase deposition apparatus and vapor-phase deposition method
TOSHIBA KK81 citations96
US5344492ASep 6, 1994
Vapor growth apparatus for semiconductor devices
TOSHIBA KK60 citations96
US6074696AJun 13, 2000
Substrate processing method which utilizes a rotary member coupled to a substrate holder which holds a target substrate
TOSHIBA KK54 citations92
US6022806AFeb 8, 2000
Method of forming a film in recess by vapor phase growth
TOSHIBA KK29 citations88
US7479338B2Jan 20, 2009
Fuel cell system
TOSHIBA KK8 citations84
US6365231B2Apr 2, 2002
Ammonium halide eliminator, chemical vapor deposition system and chemical vapor deposition process
TOSHIBA KK19 citations84
US7681760B2Mar 23, 2010
Liquid cartridge
TOSHIBA KK9 citations83
US7264897B2Sep 4, 2007
Fuel cell system
TOSHIBA KK7 citations74
US5205870AApr 27, 1993
Vapor deposition apparatus
TOSHIBA KK15 citations73
US5926402AJul 20, 1999
Simulation method with respect to trace object that event occurs in proportion to probability and computer program product for causing computer system to perform the simulation
TOSHIBA KK13 citations71
US7615295B2Nov 10, 2009
Hydrogen generator and fuel cell system
TOSHIBA KK2 citations63
US7597990B2Oct 6, 2009
Fuel cell and fuel cell system
TOSHIBA KK2 citations63
US7597982B2Oct 6, 2009
Fuel cell system with a gas supply pump that applies negative pressure to the anode and cathode
TOSHIBA KK3 citations62
US7709130B2May 4, 2010
Fuel cell
TOSHIBA KK3 citations61
US7563524B2Jul 21, 2009
Fuel cell system
TOSHIBA KK4 citations61
US7678481B2Mar 16, 2010
Fuel cell system with a fuel tank configured to store a fuel at a pressure higher than atmospheric pressure
TOSHIBA KK0 citations52
US8053120B2Nov 8, 2011
Fuel cell system and control method thereof
TOSHIBA KK0 citations51
US7364811B2Apr 29, 2008
Fuel Cell
TOSHIBA KK1 citations51
US7351489B2Apr 1, 2008
Fuel cell unit
TOSHIBA KK0 citations50
US7942974B2May 17, 2011
Method of cleaning a film-forming apparatus
TOSHIBA KK0 citations48
NUFLARE TECHNOLOGY INC
18 patentsUSD797690SSep 19, 2017
Heater for semiconductor manufacturing apparatus
NUFLARE TECHNOLOGY INC23 citations93
USD798250SSep 26, 2017
Heater
NUFLARE TECHNOLOGY INC15 citations83
US10920317B2Feb 16, 2021
Shower head, vapor phase growth apparatus and vapor phase growth method
NUFLARE TECHNOLOGY INC2 citations73
US10132001B2Nov 20, 2018
Vapor phase growth apparatus and vapor phase growth method
NUFLARE TECHNOLOGY INC2 citations73
US9869035B2Jan 16, 2018
Vapor phase growth apparatus and vapor phase growth method
NUFLARE TECHNOLOGY INC3 citations73
US9803282B2Oct 31, 2017
Vapor phase growth apparatus
NUFLARE TECHNOLOGY INC6 citations73
US9735003B2Aug 15, 2017
Film-forming apparatus and film-forming method
NUFLARE TECHNOLOGY INC2 citations73
US9624603B2Apr 18, 2017
Vapor phase growth apparatus having shower plate with multi gas flow passages and vapor phase growth method using the same
NUFLARE TECHNOLOGY INC4 citations73
US10550473B2Feb 4, 2020
Shower head, vapor phase growth apparatus, and vapor phase growth method
NUFLARE TECHNOLOGY INC3 citations72
US10407772B2Sep 10, 2019
Shower head, vapor phase growth apparatus, and vapor phase growth method
NUFLARE TECHNOLOGY INC3 citations72
US10109483B2Oct 23, 2018
Vapor phase growth apparatus, storage container, and vapor phase growth method
NUFLARE TECHNOLOGY INC4 citations72
US10385474B2Aug 20, 2019
Vapor phase growth apparatus and vapor phase growth method
NUFLARE TECHNOLOGY INC2 citations70
US11047047B2Jun 29, 2021
Shower head, vapor phase growth apparatus, and vapor phase growth method
NUFLARE TECHNOLOGY INC0 citations62
US10237917B2Mar 19, 2019
Heater and apparatus for manufacturing semiconductor device using heater
NUFLARE TECHNOLOGY INC1 citations62
US11124894B2Sep 21, 2021
Vapor phase growth apparatus and vapor phase growth method
NUFLARE TECHNOLOGY INC0 citations60
US10011901B2Jul 3, 2018
Vapor deposition method and vapor deposition apparatus
NUFLARE TECHNOLOGY INC0 citations51
US9916996B2Mar 13, 2018
Vapor phase growth method of growing a film on a substrate while heating the substrate with a heating unit
NUFLARE TECHNOLOGY INC1 citations45
US9546435B2Jan 17, 2017
Vapor phase growth apparatus and vapor phase growth method
NUFLARE TECHNOLOGY INC0 citations41