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Heater for semiconductor manufacturing apparatus

82
Assignee: NUFLARE TECHNOLOGY INCPriority: Mar 16, 2015Filed: Sep 15, 2015Granted: Sep 19, 2017
Est. expiryMar 16, 2035(~8.7 yrs left)· nominal 20-yr term from priority
Inventors:Hiroshi FurutaniYuusuke Sato
82
PatentIndex Score
23
Cited by
22
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a heater for semiconductor manufacturing apparatus, as illustrated and described.

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