Inventor · disambiguated record
David J. Chipman
Also filed as: CHIPMAN DAVID · CHIPMAN DAVID J
6 granted patents·92 citations·filing 1995–2020
82Inventor score
Files withEATON CORP2ANEMOSTAT PRODUCTS1APPLIED MATERIALS INC1AXCELIS TECH INC1VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1
Top patents by PatentIndex Score
6 records- 0181US6583428B1Apparatus for the backside gas cooling of a wafer in a batch ion implantation systemAXCELIS TECH INC·Filed 2000·Granted Jun 24, 2003·28 cites·21 claims
- 0275US5656092AApparatus for capturing and removing contaminant particles from an interior region of an ion implanterEATON CORP·Filed 1995·Granted Aug 12, 1997·27 cites·12 claims
- 0373US5670217AMethod for capturing and removing contaminant particles from an interior region of an ion implanterEATON CORP·Filed 1996·Granted Sep 23, 1997·24 cites·10 claims
- 0451US11069554B1Carbon nanotube electrostatic chuckAPPLIED MATERIALS INC·Filed 2020·Granted Jul 20, 2021·0 cites·10 claims
- 0544US10157764B2Thermal shield for electrostatic chuckVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Dec 18, 2018·0 cites·19 claims
- 0634US5987844ASnap-lock vision frame assemblyANEMOSTAT PRODUCTS·Filed 1998·Granted Nov 23, 1999·13 cites·14 claims
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