Inventor · disambiguated record
Mark Markovsky
Also filed as: MARKOVSKY MARK
2 granted patents·1 pending application·348 citations·filing 2013–2017
71Inventor score
Top patents by PatentIndex Score
3 records- 0197US8937800B2Electrostatic chuck with advanced RF and temperature uniformityLUBOMIRSKY DMITRY·Filed 2013·Granted Jan 20, 2015·305 cites·20 claims
- 0296US10904996B2Substrate support with electrically floating power supplyAPPLIED MATERIALS INC·Filed 2017·Granted Jan 26, 2021·43 cites·19 claims
- 0346US2016042961A1Electron beam plasma source with rotating cathode, backside helium cooling and liquid cooled pedestal for uniform plasma generationAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →