Inventor · disambiguated record
Sandy M. Wen
Also filed as: WEN SANDY M
2 granted patents·1 pending application·23 citations·filing 2006–2008
61Inventor score
Top patents by PatentIndex Score
3 records- 0184US7655571B2Integrated method and apparatus for efficient removal of halogen residues from etched substratesAPPLIED MATERIALS INC·Filed 2006·Granted Feb 2, 2010·11 cites·26 claims
- 0283US9735002B2Integrated apparatus for efficient removal of halogen residues from etched substratesKAWAGUCHI MARK NAOSHI·Filed 2008·Granted Aug 15, 2017·12 cites·16 claims
- 0340US2009158265A1Implementation of advanced endpoint functions within third party software by using a plug-in approachDAVIS MATTHEW FENTON·Filed 2007·Application pending·0 cites
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