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Inventor
BAKER FAYE DIANN
US
2 patents
⚠️ This page may combine multiple inventors who share the name “BAKER FAYE DIANN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTERNATIOAL BUSINESS MACHINES
1 patent
US5874318A
Feb 23, 1999
Dishing and erosion monitor structure for damascene metal processing
INTERNATIOAL BUSINESS MACHINES
26 citations
88
IBM
1 patent
US5723874A
Mar 3, 1998
Dishing and erosion monitor structure for damascene metal processing
IBM
22 citations
88