Inventor

BROOKS DANIEL SHAW

US2 patents

⚠️ This page may combine multiple inventors who share the name “BROOKS DANIEL SHAW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INTERNATIOAL BUSINESS MACHINES

1 patent

US5874318AFeb 23, 1999

Dishing and erosion monitor structure for damascene metal processing

INTERNATIOAL BUSINESS MACHINES26 citations88

IBM

1 patent

US5723874AMar 3, 1998

Dishing and erosion monitor structure for damascene metal processing

IBM22 citations88