Inventor
OTA TAKUMI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “OTA TAKUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
8 patentsUS7435978B2Oct 14, 2008
System, method and a program for correcting conditions for controlling a charged particle beam for lithography and observation, and a program and method for manufacturing a semiconductor device
TOSHIBA KK10 citations84
US7202488B2Apr 10, 2007
Correction system, method of correcting deflection distortion, program and method for manufacturing a semiconductor device
TOSHIBA KK18 citations84
US7242014B2Jul 10, 2007
Charged particle beam drawing equipment, method of adjusting aperture mask, and method of manufacturing semiconductor device
TOSHIBA KK9 citations73
US7482604B2Jan 27, 2009
Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor device
TOSHIBA KK0 citations52
US9216539B2Dec 22, 2015
Imprinting apparatus, imprinting method, and manufacturing method of uneven plate
TOSHIBA KK0 citations51
US7985958B2Jul 26, 2011
Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program
TOSHIBA KK1 citations51
US7889910B2Feb 15, 2011
Character pattern extracting method, charged particle beam drawing method, and character pattern extracting program
TOSHIBA KK0 citations41
US7459705B2Dec 2, 2008
Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device
TOSHIBA KK0 citations41
OTA TAKUMI
3 patentsUS9108343B2Aug 18, 2015
Template treatment method
OTA TAKUMI2 citations60
US9437414B2Sep 6, 2016
Pattern forming device and semiconductor device manufacturing method
OTA TAKUMI1 citations49
US8826847B2Sep 9, 2014
Imprinting apparatus, imprinting method, and manufacturing method of uneven plate
OTA TAKUMI0 citations49