Inventor
HU LIANGFA
US7 patents
⚠️ This page may combine multiple inventors who share the name “HU LIANGFA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS12334384B2Jun 17, 2025
Methods and apparatus for minimizing substrate backside damage
APPLIED MATERIALS INC0 citations61
US11756819B2Sep 12, 2023
Methods and apparatus for minimizing substrate backside damage
APPLIED MATERIALS INC0 citations61
US11515150B2Nov 29, 2022
Hardmask tuning by electrode adjustment
APPLIED MATERIALS INC0 citations57
US11560623B2Jan 24, 2023
Methods of reducing chamber residues
APPLIED MATERIALS INC0 citations48
US12539530B2Feb 3, 2026
Throttle valve and foreline cleaning using a microwave source
APPLIED MATERIALS INC0 citations47
US10971390B2Apr 6, 2021
Methods of minimizing wafer backside damage in semiconductor wafer processing
APPLIED MATERIALS INC0 citations46