Inventor
CHANG SHIH-HSUN
TW45 patents
⚠️ This page may combine multiple inventors who share the name “CHANG SHIH-HSUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
38 patentsUS11177361B2Nov 16, 2021
FinFET and gate-all-around FET with selective high-k oxide deposition
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10050147B2Aug 14, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US9859273B2Jan 2, 2018
Semiconductor structure and manufacturing process thereof
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US11043491B2Jun 22, 2021
Semiconductor device and a method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10825813B2Nov 3, 2020
Semiconductor device and a method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US10109507B2Oct 23, 2018
Fluorine contamination control in semiconductor manufacturing process
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations83
US10037995B2Jul 31, 2018
Semiconductor device and a method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US12419104B2Sep 16, 2025
Semiconductor device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations74
US10672879B2Jun 2, 2020
Method for forming FinFET and gate-all-around FET with selective high-K oxide deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10644125B2May 5, 2020
Metal gates and manufacturing methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10276574B2Apr 30, 2019
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10269968B2Apr 23, 2019
Semiconductor device including fin structures and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations73
US11948800B2Apr 2, 2024
Semiconductor device having work function metal stack
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10163626B2Dec 25, 2018
Metal gate structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9799566B1Oct 24, 2017
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US10529629B2Jan 7, 2020
Methods of forming metal gates
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US12334349B2Jun 17, 2025
Semiconductor device having work function metal stack
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12310068B2May 20, 2025
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12272736B2Apr 8, 2025
FinFET and gate-all-around FET with selective high-k oxide deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12166038B2Dec 10, 2024
Semiconductor device and a method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12040237B2Jul 16, 2024
Semiconductor device structure with spacer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11823908B2Nov 21, 2023
Semiconductor device having work function metal stack
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11764218B2Sep 19, 2023
Semiconductor device and a method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11735662B2Aug 22, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11721739B2Aug 8, 2023
FinFET and gate-all-around FET with insulator having hydrophobic sidewall
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11404418B2Aug 2, 2022
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11404555B2Aug 2, 2022
Metal gates and manufacturing methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11348841B2May 31, 2022
Semiconductor device structure with recessed spacer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11201059B2Dec 14, 2021
Device having work function metal stack and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11049970B2Jun 29, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11295990B2Apr 5, 2022
Methods of forming metal gates
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10790283B2Sep 29, 2020
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10535653B2Jan 14, 2020
Semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10763178B2Sep 1, 2020
Semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10497571B2Dec 3, 2019
Device having work function metal stack and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10262878B2Apr 16, 2019
Fluorine contamination control in semiconductor manufacturing process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10147649B2Dec 4, 2018
Semiconductor device structure with gate stack and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9922976B1Mar 20, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51