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Inventor
BOHANNON BRYNNE K
US
3 patents
Patents
3 patents
US5348619A
Sep 20, 1994
Metal selective polymer removal
TEXAS INSTRUMENTS INC
77 citations
93
US5506171A
Apr 9, 1996
Method of clean up of a patterned metal layer
TEXAS INSTRUMENTS INC
61 citations
88
USRE36006E
Dec 22, 1998
Metal selective polymer removal
TEXAS INSTRUMENTS INC
4 citations
59