Inventor · disambiguated record

Michael Kamp-Froese

Also filed as: KAMP-FROESE MICHAEL

3 granted patents·0 citations·filing 2019–2022

39Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH3

Top patents by PatentIndex Score

3 records

0154US11927888B2Method for the tracking and identification of components of lithography systems, and lithography systemZEISS CARL SMT GMBH·Filed 2022·Granted Mar 12, 2024·0 cites·21 claims
0254US11188000B2Method and device for characterizing a mask for microlithographyZEISS CARL SMT GMBH·Filed 2020·Granted Nov 30, 2021·0 cites·26 claims
0343US11480883B2Method for operating a machine for microlithographyZEISS CARL SMT GMBH·Filed 2019·Granted Oct 25, 2022·0 cites·19 claims

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