Inventor
BROUQUET PIERRE
FR3 patents
Patents
3 patentsUS5786039AJul 28, 1998
Process for electrical insulation in microelectronics, applicable in narrow cavities, by deposition of oxide in the viscous state and corresponding device
FRANCE TELECOM120 citations93
US5604149AFeb 18, 1997
Method of and device for isolating active areas of a semiconducor substrate by quasi-plane shallow trenches
FRANCE TELECOM61 citations93
US5641704AJun 24, 1997
Method of isolating active areas of a semiconductor substrate by shallow trenches and narrow trenches
FRANCE TELECOM14 citations71