Inventor · disambiguated record

Fumiaki Nagai

Also filed as: NAGAI FUMIAKI

2 granted patents·0 citations·filing 2020–2022

23Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0156US12438055B2Abnormality detection method and processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Oct 7, 2025·0 cites·9 claims
0243US11567485B2Substrate processing system and method for monitoring process dataTOKYO ELECTRON LTD·Filed 2020·Granted Jan 31, 2023·0 cites·9 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →