Inventor · disambiguated record
Hideyuki Chinju
Also filed as: CHINJU HIDEYUKI
3 granted patents·20 citations·filing 1996–2003
67Inventor score
Files withCANON KK3
Top patents by PatentIndex Score
3 records- 0150US6847696B2Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing methodCANON KK·Filed 2003·Granted Jan 25, 2005·5 cites·4 claims
- 0242US6665371B1Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing methodCANON KK·Filed 2000·Granted Dec 16, 2003·2 cites·27 claims
- 0341US5760561AMethod of controlling a stage and a system such as an exposing apparatus using the sameCANON KK·Filed 1996·Granted Jun 2, 1998·13 cites·15 claims
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