Inventor
PHAN SEE-ENG
US18 patents
⚠️ This page may combine multiple inventors who share the name “PHAN SEE-ENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS7494545B2Feb 24, 2009
Epitaxial deposition process and apparatus
APPLIED MATERIALS INC246 citations99
US7520957B2Apr 21, 2009
Lid assembly for front end of line fabrication
APPLIED MATERIALS INC162 citations98
US7396480B2Jul 8, 2008
Method for front end of line fabrication
APPLIED MATERIALS INC285 citations98
US6837968B2Jan 4, 2005
Lower pedestal shield
APPLIED MATERIALS INC40 citations96
US6726805B2Apr 27, 2004
Pedestal with integral shield
APPLIED MATERIALS INC56 citations96
US6652713B2Nov 25, 2003
Pedestal with integral shield
APPLIED MATERIALS INC47 citations96
US7252737B2Aug 7, 2007
Pedestal with integral shield
APPLIED MATERIALS INC22 citations92
US7513971B2Apr 7, 2009
Flat style coil for improved precision etch uniformity
APPLIED MATERIALS INC5 citations63
US11959167B2Apr 16, 2024
Selective cobalt deposition on copper surfaces
APPLIED MATERIALS INC0 citations62
US11384429B2Jul 12, 2022
Selective cobalt deposition on copper surfaces
APPLIED MATERIALS INC0 citations62
US12249494B2Mar 11, 2025
Remote plasma cleaning of chambers for electronics manufacturing systems
APPLIED MATERIALS INC0 citations59
US11854773B2Dec 26, 2023
Remote plasma cleaning of chambers for electronics manufacturing systems
APPLIED MATERIALS INC0 citations59
GANGULI SESHADRI
4 patentsUS8110489B2Feb 7, 2012
Process for forming cobalt-containing materials
GANGULI SESHADRI15 citations92
US8563424B2Oct 22, 2013
Process for forming cobalt and cobalt silicide materials in tungsten contact applications
GANGULI SESHADRI10 citations83
US8187970B2May 29, 2012
Process for forming cobalt and cobalt silicide materials in tungsten contact applications
GANGULI SESHADRI12 citations83
US8815724B2Aug 26, 2014
Process for forming cobalt-containing materials
GANGULI SESHADRI3 citations62