Inventor · disambiguated record
Vien Quach
Also filed as: QUACH VIEN
2 granted patents·26 citations·filing 2002–2004
62Inventor score
Technology areasG05D
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0165US6732017B2System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning systemLAM RES CORP·Filed 2002·Granted May 4, 2004·15 cites·20 claims
- 0260US7054719B2System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning systemLAM RES CORP·Filed 2004·Granted May 30, 2006·11 cites·24 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →