Inventor
VIHERVAARA ANTON
FI6 patents
Patents
6 patentsUS12065739B2Aug 20, 2024
Vapor deposition processes
ASM IP HOLDING BV2 citations71
US11492703B2Nov 8, 2022
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
ASM IP HOLDING BV4 citations71
US12442076B2Oct 14, 2025
Method and system for depositing noble metal-containing layer
ASM IP HOLDING BV0 citations61
US12104250B2Oct 1, 2024
Vapor deposition processes
ASM IP HOLDING BV0 citations61
US11814715B2Nov 14, 2023
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
ASM IP HOLDING BV0 citations61
US12509765B2Dec 30, 2025
Method and system for depositing transition metal carbide
ASM IP HOLDING BV0 citations57