Inventor

ANGELOV IVELIN A

US4 patents

⚠️ This page may combine multiple inventors who share the name “ANGELOV IVELIN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULTRATECH INC

2 patents

US7731798B2Jun 8, 2010

Heated chuck for laser thermal processing

ULTRATECH INC8 citations81

US7326877B2Feb 5, 2008

Laser thermal processing chuck with a thermal compensating heater module

ULTRATECH INC0 citations49

NOVELLUS SYSTEMS INC

1 patent

USD641829SJul 19, 2011

Plasma reactor showerhead face plate having concentric ridge pattern

NOVELLUS SYSTEMS INC16 citations77

LAM RES CORP

1 patent

US9911620B2Mar 6, 2018

Method for achieving ultra-high selectivity while etching silicon nitride

LAM RES CORP3 citations71