USD641829SActiveUtility

Plasma reactor showerhead face plate having concentric ridge pattern

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Assignee: NOVELLUS SYSTEMS INCPriority: Oct 29, 2010Filed: Oct 29, 2010Granted: Jul 19, 2011
Est. expiryOct 29, 2030(~4.3 yrs left)· nominal 20-yr term from priority
Inventors:Ivelin AngelovJames Eugene CaronIlia Kalinovshi
67
PatentIndex Score
16
Cited by
10
References
1
Claims

Claims

exact text as granted — not AI-modified
We claim the ornamental design for a plasma reactor showerhead face plate having concentric ridge pattern, as shown and described.

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