Inventor · disambiguated record

Sonja T. De Vrieze-Voorn

Also filed as: DE VRIEZE-VOORN SONJA T

1 granted patent·31 citations·filing 2001–2001

44Inventor score

Technology areasH10P

Files withASML NETHERLANDS BV1

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1 record

0180US6509951B2Lithographic projection apparatus having a temperature controlled heat shieldASML NETHERLANDS BV·Filed 2001·Granted Jan 21, 2003·31 cites·20 claims

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