Inventor · disambiguated record
William Daniel Meisburger
Also filed as: MEISBURGER WILLIAM D · MEISBURGER WILLIAM DANIEL
9 granted patents·215 citations·filing 1980–2015
90Inventor score
Top patents by PatentIndex Score
9 records- 0194US7508570B1Gray level method for slim-based optical lithographyMASKLESS LITHOGRAPHY INC·Filed 2007·Granted Mar 24, 2009·27 cites·25 claims
- 0294US7167296B2Continuous direct-write optical lithographyMASKLESS LITHOGRAPHY INC·Filed 2003·Granted Jan 23, 2007·54 cites·43 claims
- 0391US7719753B2Method of operation for SLM-based optical lithography toolMASKLESS LITHOGRAPHY INC·Filed 2007·Granted May 18, 2010·12 cites·25 claims
- 0491US7295362B2Continuous direct-write optical lithographyMASKLESS LITHOGRAPHY INC·Filed 2004·Granted Nov 13, 2007·33 cites·62 claims
- 0590US7639416B2Apparatus for SLM-based optical lithography with gray level capabilityMASKLESS LITHOGRAPHY INC·Filed 2007·Granted Dec 29, 2009·10 cites·24 claims
- 0675US4943769AApparatus and method for opens/shorts testing of capacitively coupled networks in substrates using electron beamsIBM·Filed 1989·Granted Jul 24, 1990·34 cites·5 claims
- 0767US4330708AElectron lensMEISBURGER WILLIAM D·Filed 1980·Granted May 18, 1982·15 cites·18 claims
- 0866US5057773AMethod for opens/shorts testing of capacitively coupled networks in substrates using electron beamsIBM·Filed 1990·Granted Oct 15, 1991·29 cites·3 claims
- 0965US10026588B2Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identicalKEYSIGHT TECHNOLOGIES INC·Filed 2015·Granted Jul 17, 2018·1 cites·7 claims
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