Inventor

HATANPÄÄ TIMO

FI30 patents

⚠️ This page may combine multiple inventors who share the name “HATANPÄÄ TIMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HATANPÄÄ TIMO

ASM IP HOLDING BV

Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Vapor deposition of thin films comprising gold

Deposition of transition metal—comprising material

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

Methods of forming a transition metal containing film on a substrate by a cyclical deposition process

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Vapor deposition processes

Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

Vapor deposition of thin films comprising gold

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus

Methods of forming a transition metal containing film on a substrate by a cyclical deposition process

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

Synthesis and use of precursors for ALD of group VA element containing thin films

Method and system for depositing noble metal-containing layer

Vapor deposition processes

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films

Vapor deposition of thin films comprising gold

Method and system for depositing transition metal carbide

Synthesis and use of precursors for ALD of group VA element containing thin films

PORE VILJAMI

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films