Inventor

LESKELÄ MARKKU

FI49 patents

⚠️ This page may combine multiple inventors who share the name “LESKELÄ MARKKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LESKELÄ MARKKU

ASM IP HOLDING BV

Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus

Method for depositing a metal chalcogenide on a substrate by cyclical deposition

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Vapor deposition of thin films comprising gold

Vapor deposition of LiF thin films

Area selective organic material removal

Deposition of transition metal—comprising material

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

Methods of forming a transition metal containing film on a substrate by a cyclical deposition process

Synthesis and use of precursors for ALD of group VA element containing thin films

Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

Methods for filling a gap feature on a substrate surface and related semiconductor structures

Vapor deposition of thin films comprising gold

Area selective organic material removal

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus

Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures

Methods of forming a transition metal containing film on a substrate by a cyclical deposition process

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

Synthesis and use of precursors for ALD of group VA element containing thin films

Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures

Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

Atomic layer deposition and etching of transition metal dichalcogenide thin films

Atomic layer deposition and etching of transition metal dichalcogenide thin films

Vapor deposition of thin films comprising gold

Methods for filling a gap feature on a substrate surface and related semiconductor structures

Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures

Synthesis and use of precursors for ALD of group VA element containing thin films

Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures

Methods and apparatus for depositing a chalcogenide film and structures including the film

Method for depositing a metal chalcogenide on a substrate by cyclical deposition

Atomic layer deposition of aluminum fluoride thin films

ASM INT NV

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

PORE VILJAMI

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Methods for forming conductive titanium oxide thin films

FÄRM ELINA

Microcontact printed films as an activation layer for selective atomic layer deposition

LAURILA-LUMME AULI

Process for producing mechanical pulp suitable for paper or cardboard making